Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US7244949B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 3, 2006 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Mar 3, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31774
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron-optical arrangement provides a primary beam path for a beam of primary electrons and a secondary beam path for secondary electrons. The electron-optical arrangement includes a magnet arrangement having first, second and third magnetic field regions. The first magnetic field region is traversed by the primary beam path and the secondary beam path. The second magnetic field region is arranged in the primary beam path upstream of the first magnetic field region and is not traversed by the secondary beam path. The first and second magnetic field regions deflect the primary beam path in substantially opposite directions. The third magnetic field region is arranged in the secondary beam path downstream of the first magnetic field region and is not traversed by the first beam path. The first and third magnetic field regions deflect the secondary beam path in a substantially same direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.