Alignment using latent images
US7245352B2 · kind B2 · utility
1Cited by
7References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2004 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Dec 11, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7084
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Systems and techniques for alignment with latent images. In one implementation, a method includes detecting a location of a latent image on a substrate, repositioning the substrate based on the detected location of the latent image, and patterning the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.