Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
US7245416B2 · kind B2 · utility
7Cited by
1References
23Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 1, 2006 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Mar 1, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the first substrate to the second substrate and forming a mirror plate from a portion of the first substrate. The mirror plate has an upper surface and a lower surface. The method further includes forming a hinge coupled to the mirror plate and forming a reflective surface coupled to the upper surface of the mirror plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.