Alignment device
US7246445B2 · kind B2 · utility
1Cited by
11References
18Claims
0Family size
Inventor
Key dates
| Filing date | Dec 16, 2004 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Feb 6, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an alignment device for aligning an object in a plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.