Method and apparatus for multivariate fault detection and classification
US7248939B1 · kind B1 · utility
12Cited by
1References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2005 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Sep 4, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a method and apparatus for multivariate fault identification and classification. The method includes accessing data indicative of a plurality of physical parameters associated with a plurality of processed semiconductor wafers and providing at least one summary report including information indicative of at least one univariate representation of the accessed data and at least one multivariate representation of the accessed data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.