Direct relative motion measurement for vibration induced noise and drift cancellation
US7249002B1 · kind B1 · utility
16Cited by
4References
25Claims
0Family size
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Key dates
| Filing date | Aug 30, 2004 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Apr 28, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface analysis apparatus and a method for compensating for mechanical vibrations and drifts in a surface analysis instrument are disclosed. A probe that is sensitive to the distance between the probe and a sample surface provides a probe signal. The probe signal contains information about the surface properties and noise due to changes in the probe-surface distance. A sensor measures a displacement between a probe and the sample surface. The sensor is substantially insensitive to the surface properties measured by the probe. The displacement measurement can be used to compensate for the noise in the probe signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.