MEMS inductor with very low resistance
US7250842B1 · kind B1 · utility
38Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2005 |
| Grant date | Jul 31, 2007 |
| Priority date | — |
| Expiry date | Aug 9, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F2017/0066
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A very, very low resistance micro-electromechanical system (MEMS) inductor, which provides resistance in the single-digit milliohm range, is formed by utilizing a single thick wide loop of metal formed around a magnetic core structure. The magnetic core structure, in turn, can utilize a laminated Ni—Fe structure that has an easy axis and a hard axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.