Surface area deposition trap
US7252011B2 · kind B2 · utility
137Cited by
35References
36Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2002 |
| Grant date | Aug 7, 2007 |
| Priority date | — |
| Expiry date | Mar 11, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of gas or fluid, and a deposition trap disposed in the pathway. The deposition trap provides a plurality of channels, each of the channels being narrower than the pathway.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.