Probe card with tunable stage and at least one replaceable probe
US7253646B2 · kind B2 · utility
12Cited by
14References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2005 |
| Grant date | Aug 7, 2007 |
| Priority date | — |
| Expiry date | Feb 2, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.