Method and apparatus for simultaneous 2-D and topographical inspection
US7253891B2 · kind B2 · utility
29Cited by
21References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2004 |
| Grant date | Aug 7, 2007 |
| Priority date | — |
| Expiry date | Nov 11, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/06113
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.