Catadioptric projection optical system and exposure apparatus having the same
US7253971B2 · kind B2 · utility
0Cited by
1References
26Claims
0Family size
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Key dates
| Filing date | Oct 20, 2005 |
| Grant date | Aug 7, 2007 |
| Priority date | — |
| Expiry date | Oct 20, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70275
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.