Chiaki Terasawa
25Patents
12h-index
13Co-inventors
74Inventor score
Filing activity: Dec 21, 1990 → Jun 23, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6829099B2 | Projection optical system and projection exposure apparatus | Physics | 47 | Expired |
| US6995918B2 | Projection optical system and projection exposure apparatus | Physics | 41 | Expired |
| US7092168B2 | Projection optical system and projection exposure apparatus | Physics | 26 | Expired |
| US7239453B2 | Projection optical system and projection exposure apparatus | Physics | 25 | Active |
| US7075726B2 | Projection optical system and projection exposure apparatus | Physics | 25 | Expired |
| US6995833B2 | Projection optical system, exposure apparatus, and device manufacturing method | Physics | 23 | Expired |
| US5136431A | Zoom lens of the internal focus type | Physics | 22 | Expired |
| US5790316A | Zoom lens | Physics | 20 | Expired |
| US6947210B2 | Catoptric projection optical system, exposure apparatus and device fabrication method using same | Physics | 20 | Expired |
| US5760967A | Zoom lens | Physics | 15 | Expired |
| US6084721A | Zoom lens | Physics | 14 | Expired |
| US5191475A | Zoom lens | Physics | 12 | Expired |
| US5583700A | Zoom lens | Physics | 10 | Expired |
| US6459534B1 | Projection optical system and projection exposure apparatus with the same, and device manufacturing method | Physics | 7 | Expired |
| US5751497A | Zoom lens | Physics | 6 | Expired |
| US7232233B2 | Catoptric reduction projection optical system and exposure apparatus using the same | Physics | 5 | Expired |
| US6867922B1 | Projection optical system and projection exposure apparatus using the same | Physics | 4 | Expired |
| US6860610B2 | Reflection type projection optical system, exposure apparatus and device fabrication method using the same | Physics | 4 | Expired |
| US7130018B2 | Catoptric projection optical system, exposure apparatus and device fabrication method | Physics | 3 | Expired |
| US6621555B1 | Projection optical system and projection exposure apparatus with the same, and device manufacturing method | Physics | 3 | Expired |
| US7053986B2 | Projection optical system, exposure apparatus, and device manufacturing method | Physics | 2 | Expired |
| US7317571B2 | Catadioptric projection optical system, exposure apparatus having the same, device fabrication method | Physics | 0 | Expired |
| US7283294B2 | Catadioptric projection optical system, exposure apparatus having the same, device fabrication method | Physics | 0 | Expired |
| US7268952B2 | Catadioptric projection system, and exposure apparatus having the same | Physics | 0 | Expired |
| US7253971B2 | Catadioptric projection optical system and exposure apparatus having the same | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.