Probe card, having cantilever-type probe and method
US7256591B2 · kind B2 · utility
2Cited by
9References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2002 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Oct 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card is used to test an electronic device. The probe card includes a base plate and a cantilever-type probe arranged on the base plate. The cantilever-type probe has an end that contacts the contacted body and moves when contacting the contacted body. A stopper arranged on the base plate restricts the movement of the cantilever-type probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.