Method and system for testing semiconductor devices
US7256600B2 · kind B2 · utility
15Cited by
19References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2004 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Dec 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31924
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device tester includes a parametric measurement unit (PMU) stage for producing a DC test signal and a pin electronics (PE) stage for producing an AC test signal to test a semiconductor device. A driver circuit is capable of providing a version of the DC test signal and a version of the AC test signal to the semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.