Apparatus and method for aligning devices on carriers
US7258703B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2005 |
| Grant date | Aug 21, 2007 |
| Priority date | — |
| Expiry date | Jan 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method are provided for aligning a plurality of semiconductor devices placed on a carrier. Alignment guides are located adjacent to each device in use, and arranged such that they correspond to a desired alignment of each semiconductor device. For alignment, the semiconductor devices are held by a positioning device comprising a plurality of holders, each holder being configured to generate a force to hold a semiconductor device. Actuators are also provided that are operative to move the positioning device and holders to bias the semiconductor devices against the alignment guides to orientate the semiconductor devices until they are aligned with said alignment guides.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.