Bearing assembly, stage device using same, and exposure apparatus using same
US7262524B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 31, 2005 |
| Grant date | Aug 28, 2007 |
| Priority date | — |
| Expiry date | Aug 31, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2322/39
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A stage apparatus includes a guide provided with a surface including a magnetic body, a moving body movable along the surface, a gas bearing for supporting the moving body with respect to the surface, and a magnet which is supplied to the moving body and produces a magnetic attractive force with the magnetic body. The surface of the guide has edges to define its size in a width direction, which is orthogonal to a traveling direction of the moving body to limit movement of the moving body in the width direction, using a magnetic attractive force of the magnet in a direction parallel to the surface, and to apply pre-pressure to the gas bearing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.