Patent · US Expired

Wafer-level testing of optical and optoelectronic chips

US7262852B1 · kind B1 · utility

15Cited by
8References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 14, 2005
Grant dateAug 28, 2007
Priority date
Expiry dateNov 14, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/4224
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.