Utilizing a protective plug to maintain the integrity of the FTP shrink hinge
US7262900B2 · kind B2 · utility
3Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2005 |
| Grant date | Aug 28, 2007 |
| Priority date | — |
| Expiry date | Nov 9, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/053
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
As robust hinge post structure for use with torsional hinged devices such as micromirrors and method of manufacturing is disclosed. The fabrication process uses a protective layer such as BARC on the bottom of the aperture used to form the hinge post structure to protect an oxide layer during an etching step. The oxide layer, in turn protects the metal layer at the bottom of the aperture. Therefore, the metal layer, the oxide layer, and the protective layer prevent the erosion and/or pitting of the bottom electrode during a cleaning process, and provide additional support to the structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.