Robot-guidance assembly for providing a precision motion of an object
US7264436B2 · kind B2 · utility
9Cited by
3References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 18, 2005 |
| Grant date | Sep 4, 2007 |
| Priority date | — |
| Expiry date | Aug 10, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20317
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.