Cooling apparatus
US7265812B2 · kind B2 · utility
3Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2006 |
| Grant date | Sep 4, 2007 |
| Priority date | — |
| Expiry date | Oct 19, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B27/52
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.