Integrated resonator structure and methods for its manufacture and use
US7268645B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2005 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Aug 5, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2001/0064
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved integrated LC resonator and methods for making and using the same are disclosed. The resonator includes (i) a first capacitor plate; (ii) an inductor over and in electrical communication with the first capacitor plate; and (iii) a second capacitor plate over and in electrical communication with the inductor. The method of making includes sequentially forming a first capacitor plate, a first dielectric layer thereon, a first via and an inductor, a second dielectric layer on the inductor, and a second via and a second capacitor plate. Each of the capacitor plates and the inductor are generally formed in different integrated circuit layers (for example, different metallization layers). Embodiments of the present invention can advantageously provide an integrated LC resonator tank having: (i) relatively high Q by reducing or minimizing parasitic effects; and (ii) relatively high shielding from the semiconductor substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.