Catadioptric projection system, and exposure apparatus having the same
US7268952B2 · kind B2 · utility
0Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2005 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Dec 23, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70341
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective reflectors, a lens unit arranged in an optical path between the two deflective reflectors, the lens unit having a negative refractive power, and not forming a reciprocating optical system that passes incident light and reflected light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.