Method and apparatus of vibration isolation, in particular for electron beam metrology tools
US7269995B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 24, 2004 |
| Grant date | Sep 18, 2007 |
| Priority date | — |
| Expiry date | Dec 24, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0216
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is provided a method and an apparatus for isolating mechanical vibrations reacting to beam metrology tools. The apparatus includes an outer structure for supporting a metrology instrument, and a chuck for holding a specimen with respect to the metrology instrument in an intended defined position for performing measurements on the specimen by the metrology instrument. The apparatus also includes at least one active vibration isolator means coupled to the chuck for compensating relative movement between the specimen and the metrology instrument. A method is also provided that includes detecting change of position of the specimen in response to mechanical vibrations, and effectuating an active modification of the position of the chuck in response to the detection for counteracting a relative displacement between the specimen and the metrology instrument.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.