Device and method for transporting wafer-shaped articles
US7270510B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 9, 2003 |
| Grant date | Sep 18, 2007 |
| Priority date | — |
| Expiry date | Nov 10, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped article can be treated, a cassette-holding unit for holding at least one cassette storing at least one wafer-shaped article therein and a transport system for picking a wafer-shaped article from a cassette and placing it into one of a process unit. The apparatus has a transport unit movably mounted on a linear track. The transport unit includes at least one holding member for holding a single wafer-shaped article in a substantially vertical plane parallel to the linear track.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.