System for creating a turbulent flow of fluid between a mold and a substrate

US7270533B2 · kind B2 · utility

Assignees

• THE UNIVERSTY OF TEXAS SYSTEM,BOARD OF REGENTS · US
• Molecular Imprints, Inc. · US

Inventors

• Ian McMackin · Austin, US
• Nicholas A. Stacey · Austin, US
• Daniel Babbs · Austin, US
• Duane J. Voth · Austin, US
• Mathew P. C. Watts · Austin, US
• Van Nguyen Truskett · Austin, US
• Frank Y. Xu · Round Rock, US
• Ronald D. Voisin · Austin, US
• Pankaj Lad · Austin, US

Key dates

• Filing date: Jul 23, 2004
• Grant date: Sep 18, 2007
• Expiry date: Aug 11, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/909
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.