Profiling complex surface structures using scanning interferometry
US7271918B2 · kind B2 · utility
41Cited by
30References
83Claims
0Family size
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Key dates
| Filing date | Mar 8, 2004 |
| Grant date | Sep 18, 2007 |
| Priority date | — |
| Expiry date | Dec 29, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.