Semiconductor-processing apparatus provided with susceptor and placing block
US7276123B2 · kind B2 · utility
16Cited by
5References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2004 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Jun 13, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4585
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A semiconductor-processing apparatus comprises a susceptor and removable placing blocks detachably placed at a periphery of the susceptor for transferring a substrate. Retractable supporting members are provided for detaching/attaching the placing blocks from/to the susceptor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.