Apparatus for polarization-specific examination, optical imaging system, and calibration method
US7277182B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2004 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Jan 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70591
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device for polarization-specific examination of an optical system having a detector part that has polarization detector means for recording the exit state of polarization of radiation emerging from the optical system. Also, an associated optical imaging system, and a calibration method for the device. The device includes a polarization detector with a polarizing grating structure. Provided as an alternative is a device for snapshot polarimetry having a birefringent element and downstream polarizer element that adequately polarizes nonquasi-parallel radiation. The device may be used for determining the influence on the state of polarization of UV radiation by a microlithographic projection objective.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.