Markus Mengel
16Patents
4h-index
26Co-inventors
56Inventor score
Filing activity: Jul 29, 2003 → Apr 18, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7760366B2 | System for measuring the image quality of an optical imaging system | Emerging Cross-Sectional Technologies | 25 | Active |
| US7796274B2 | System for measuring the image quality of an optical imaging system | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7286245B2 | Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser | Physics | 12 | Expired |
| US7277182B2 | Apparatus for polarization-specific examination, optical imaging system, and calibration method | Physics | 8 | Expired |
| US7924436B2 | Method for approximating an influence of an optical system on the state of polarization of optical radiation | Physics | 4 | Active |
| US7456933B2 | Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus | Physics | 2 | Active |
| US7289223B2 | Method and apparatus for spatially resolved polarimetry | Physics | 2 | Expired |
| US9034539B2 | Controllable transmission and phase compensation of transparent material | Chemistry; Metallurgy | 1 | Active |
| US8488127B2 | System for measuring the image quality of an optical imaging system | Emerging Cross-Sectional Technologies | 1 | Active |
| US9429495B2 | System for measuring the image quality of an optical imaging system | Emerging Cross-Sectional Technologies | 0 | Active |
| US11609506B2 | System and method for lateral shearing interferometry in an inspection tool | Physics | 0 | Active |
| US8675178B2 | Microlithographic projection exposure apparatus | Physics | 0 | Active |
| US9798249B2 | Method and apparatus for compensating at least one defect of an optical system | Physics | 0 | Active |
| US8735030B2 | Method and apparatus for modifying a substrate surface of a photolithographic mask | Physics | 0 | Active |
| US9274440B2 | Arrangement for and method of characterising the polarization properties of an optical system | Physics | 0 | Active |
| US8823948B2 | System for measuring the image quality of an optical imaging system | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.