Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

US7277188B2 · kind B2 · utility

Assignees

• Cymer, LLC · US
• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Palash P. Das · Vista, US
• Thomas Hofmann · San Diego, US
• Otto Boucky · Heidenheim, DE
• Ernst Stump · Oberkochen, DE
• Berthold Matzkovits · Gerstetten, DE
• Michael Hoell · Aalen, DE
• Joerg Walther · Gerstetten, DE
• Kurt Brenner · Satteldorf, DE
• Guenter Grupp · Donzdorf, DE

Key dates

• Filing date: May 26, 2005
• Grant date: Oct 2, 2007
• Expiry date: Dec 14, 2025

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D86/0251
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.