Method for the wet treatment of disk-like objects
US7279116B2 · kind B2 · utility
8Cited by
1References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 17, 2003 |
| Grant date | Oct 9, 2007 |
| Priority date | — |
| Expiry date | Sep 11, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67086
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a method for the treatment of disk-like objects with one first liquid and at least one second liquid at least in a defined edge region of a disk-like object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.