System for controlling a volume of material on a mold
US7281919B2 · kind B2 · utility
19Cited by
32References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2005 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Apr 14, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.