Porous silicon composite structure as large filtration array
US7282148B2 · kind B2 · utility
25Cited by
39References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2003 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Sep 10, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2325/24
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A novel asymmetric filter membrane, and process for making is disclosed in several exemplary versions. The membrane structure is physically robust and suitable for use in a wide variety of applications. The support membrane is may be comprised of material such as a porous silicon or a silicon oxide, and the separation membrane may be comprised of material such as a polymer, zeolite film, or silicon oxide. The process relies on steps adapted from the microelectronics industry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.