Method of manufacturing light-propagating probe for near-field microscope
US7282157B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2003 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Mar 5, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/262
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A manufacturing method for a light propagating probe comprises a step of sharpening a light-propagating body having a sharpened section formed on an optical fiber, a step of forming the light-propagating body into a hook shape close to the sharpened section, a metal film coating step for forming a transparent opening section in a tip section, a step of protecting the transparent opening section with a resist material, a step of forming a reflecting surface for a light lever method, a step for metal film coating a spring operating part to the rear from the hook-shaped section, and a step of removing the resist material protecting the transparent opening section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.