Patent · US Expired

Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator

US7284430B2 · kind B2 · utility

46Cited by

3References

14Claims

0Family size

Assignee

The Regents of the University of California · US

Inventors

Cenk Acar · Laguna Beach, US
Andrei M. Shkel · Irvine, US

Key dates

Filing date	Aug 15, 2005
Grant date	Oct 23, 2007
Priority date	—
Expiry date	Nov 4, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5719
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope with nonresonant actuation with a drive direction, sense direction and a direction perpendicular to the drive and sense directions comprises a planar substrate, a 2-DOF sense-mode oscillator coupled to the substrate operated at a flattened wide-bandwidth frequency region, and a 1-DOF drive mode oscillator coupled operated at resonance in the flattened wide-bandwidth frequency region to achieve large drive-mode amplitudes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.