Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser

US7286245B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Ulrich Wegmann · Oberkochen, DE
• Michael Hartl · Unterhaching, DE
• Markus Mengel · Heidenheim, DE
• Manfred Dahl · Lauchheim, DE
• Helmut Haidner · Aalen, DE
• Martin Schriever · Aalen, DE
• Michael Totzeck · Schwäbisch Gmünd, DE

Key dates

• Filing date: Jul 29, 2003
• Grant date: Oct 23, 2007
• Expiry date: Aug 27, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70591
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and an apparatus for determining the influencing of the state of polarization of optical radiation by an optical system under test, wherein radiation with a defined entrance state of polarization is directed onto the optical system, the exit-side state of polarization is measured, and the influencing of the state of polarization is determined by the optical system with the aid of evaluation of the exit state of polarization with reference to the entrance state of polarization. An analyser arrangement which can be used for this purpose is also disclosed. The method and the apparatus are used, e.g., to determine the influencing of the state of polarization of optical radiation by an optical imaging system of prescribable aperture, the determination being performed in a pupil-resolved fashion.