Method and apparatus for non-contact three-dimensional surface measurement
US7286246B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 22, 2004 |
| Grant date | Oct 23, 2007 |
| Priority date | — |
| Expiry date | Feb 11, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/254
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze the contrast of a grating image deformed in accordance with the shape of the object and thereby obtain the shape thereof. The method enables measurement of a three-dimensional shape over a large measurement range in a short time in a non-contact manner by successively shifting the focus on the projection and the imaging sides to enlarge the measurement range in the direction of depth.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.