Optical thin film and mirror using the same
US7286637B2 · kind B2 · utility
4Cited by
18References
4Claims
0Family size
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Key dates
| Filing date | Sep 7, 2004 |
| Grant date | Oct 23, 2007 |
| Priority date | — |
| Expiry date | Nov 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/065
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
To provide an optical thin film structure capable of efficiently dissipating heat in an optical thin film which is generated upon irradiating a surface of an X-ray mirror made up of the optical thin film with an X-ray. The optical thin film having an isotope purity higher than a natural isotope abundance ratio is formed on a mirror to increase heat conductivity of the optical thin film itself and quickly dissipate heat accumulated in the thin film to the outside of an optical system. Consequently, the mirror having high reflectively can be obtained, in which a fine structure of the optical thin film is by no means broken.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.