Inventor · Yokohama, JP

Hidehiro Kanazawa

15Patents
6h-index
10Co-inventors
55Inventor score

Filing activity: Mar 18, 1997 → Jan 11, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US6458253B2 Thin film production process and optical device Chemistry; Metallurgy 29 Expired
US5885712A Anti-reflection film and optical system using the same Chemistry; Metallurgy 15 Expired
US6472087B1 Antireflection film, optical element with antireflection film, and production method of the antireflection film Physics 14 Expired
US6261696A Optical element with substrate containing fluorite as main ingredient, and method and apparatus for producing the optical element Physics 8 Expired
US6217719A Process for thin film formation by sputtering Chemistry; Metallurgy 8 Expired
US6396626B1 Antireflection film and optical element coated with the antireflection film Physics 6 Expired
US7229532B2 Sputtering apparatus Electricity 5 Expired
US6383346B2 Method for forming thin films Chemistry; Metallurgy 4 Expired
US7286637B2 Optical thin film and mirror using the same Physics 4 Expired
US6947209B2 Antireflection film and optical element having the same Physics 3 Expired
US7162009B2 X-ray multi-layer mirror and x-ray exposure apparatus Physics 2 Expired
US7041391B2 Method for forming thin films Chemistry; Metallurgy 1 Expired
US7116473B2 Optical element with antireflection film Physics 0 Expired
US7342715B2 Multilayer film reflector for soft X-rays and manufacturing method thereof Physics 0 Expired
US7035000B2 Antireflection film and optical element having the same Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.