Method of manufacturing ZnO substrate from ZnO crystal formed by hydrothermal synthesis method
US7288208B2 · kind B2 · utility
1Cited by
18References
8Claims
0Family size
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Key dates
| Filing date | Mar 29, 2006 |
| Grant date | Oct 30, 2007 |
| Priority date | — |
| Expiry date | Jun 16, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B33/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Li impurities are removed from a substrate of ZnO formed by a hydrothermal synthesis method. The surface layer of the substrate with Li impurities removed, is etched to planarize the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.