Middle layer of die structure that comprises a cavity that holds an alkali metal
US7292111B2 · kind B2 · utility
9Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2004 |
| Grant date | Nov 6, 2007 |
| Priority date | — |
| Expiry date | May 28, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG04F5/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus in one example comprises a die structure that comprises a middle layer, a first outside layer, and a second outside layer. The middle layer comprises a cavity that holds an alkali metal, and one of the first outside layer and the second outside layer comprises a channel that leads to the cavity. The middle layer, the first outside layer, and the second outside layer comprise dies from one or more wafer substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.