Patent · US Expired

Middle layer of die structure that comprises a cavity that holds an alkali metal

US7292111B2 · kind B2 · utility

9Cited by
3References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 26, 2004
Grant dateNov 6, 2007
Priority date
Expiry dateMay 28, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG04F5/14
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus in one example comprises a die structure that comprises a middle layer, a first outside layer, and a second outside layer. The middle layer comprises a cavity that holds an alkali metal, and one of the first outside layer and the second outside layer comprises a channel that leads to the cavity. The middle layer, the first outside layer, and the second outside layer comprise dies from one or more wafer substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.