Conformal coatings for micro-optical elements, and method for making the same
US7294360B2 · kind B2 · utility
5Cited by
20References
49Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2003 |
| Grant date | Nov 13, 2007 |
| Priority date | — |
| Expiry date | Mar 31, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure having a surface with uneven structures is exposed to one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film conforms to surface structures having varying complex dimensions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.