Jarmo Maula
13Patents
5h-index
10Co-inventors
59Inventor score
Filing activity: Mar 31, 2003 → Nov 27, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7021330B2 | Diaphragm valve with reliability enhancements for atomic layer deposition | Emerging Cross-Sectional Technologies | 364 | Expired |
| US7141095B2 | Precursor material delivery system for atomic layer deposition | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6941963B2 | High-speed diaphragm valve for atomic layer deposition | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6907897B2 | Diaphragm valve for high-temperature precursor supply in atomic layer deposition | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7901736B2 | Multilayer material and method of preparing same | Emerging Cross-Sectional Technologies | 7 | Active |
| US7294360B2 | Conformal coatings for micro-optical elements, and method for making the same | Emerging Cross-Sectional Technologies | 5 | Expired |
| US9290840B2 | Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same | Chemistry; Metallurgy | 3 | Active |
| US7191793B2 | Diaphragm valve for atomic layer deposition | Emerging Cross-Sectional Technologies | 3 | Expired |
| US8367561B2 | Method in depositing metal oxide materials | Chemistry; Metallurgy | 3 | Active |
| US8945676B2 | Method and apparatus for coating | Emerging Cross-Sectional Technologies | 1 | Active |
| US9892814B2 | Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same | Chemistry; Metallurgy | 0 | Active |
| US10590536B2 | Apparatus, method and reaction chamber | Electricity | 0 | Active |
| US10167551B2 | Apparatus, method and reaction chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.