Bubble suppressing flow controller with ultrasonic flow meter
US7297047B2 · kind B2 · utility
4Cited by
21References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2005 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Jan 24, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B57/02
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for the delivery of slurry solution comprising an ultrasonic flow meter positioned between a fluid preparation manifold and a slurry delivery arm, and a shutoff valve positioned between a proportional valve and the slurry delivery arm. Also, a method and apparatus for the delivery of slurry solution including an ultrasonic flow meter positioned to receive fluid from a fluid preparation manifold, a proportional valve and stepper motor in communication with the flow meter, and a reverse flow restrictor in communication with the proportional valve and a slurry delivery arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.