Column simultaneously focusing a particle beam and an optical beam
US7297948B2 · kind B2 · utility
6Cited by
89References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2005 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Dec 6, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterized in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said output orifice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.