Debris collector for EUV light generator
US7297968B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2004 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Jan 4, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70916
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A debris collector for EUV light generators is disclosed which enables to improve durabilities of optical units in a chamber including a collector mirror, to keep the vacuum degree in the chamber, and to suppress decrease in EUV light output by efficiently collecting debris bumping into the collector mirror at high speed from a target transformed into a plasma or debris adhering the collector mirror. A laser light irradiator (10) is so arranged that the irradiation direction of a laser light (L) is opposite to the traveling direction of a target (1). A debris collector (30) for collecting debris (3) is arranged in the travel path of the target (1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.