Method of measuring the leakage current of a deep trench isolation structure
US7298159B1 · kind B1 · utility
7Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2005 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Jul 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The trench leakage current of a deep trench isolation structure is measured. The deep trench isolation structure, which is filled with polysilicon, contacts both a first region of a first conductivity type and a second region of a second conductivity type, and is proximate to a third region of the first conductivity type formed in the second region. Test voltages are applied to the structures and the leakage current is measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.