Patent · US Expired

Projection optical system and method

US7301707B2 · kind B2 · utility

19Cited by

9References

40Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dave Shafer · Fairfield, US
Susanne Beder · Aalen, DE

Key dates

Filing date	Sep 1, 2005
Grant date	Nov 27, 2007
Priority date	—
Expiry date	Sep 1, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70341
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical system; wherein the projection optical system is configured to have a numerical aperture on a side of the second object of greater than 1 wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between, the first and second objects.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.