Excimer laser with electron emitters
US7305019B2 · kind B2 · utility
0Cited by
8References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2005 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Jun 30, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/038
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus, system, and method for an excimer laser having lasing gas and electron emitters emitting electrons upon the application of an emitting voltage is described herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.