Patent · US Expired

Method of forming a multi-layer semiconductor structure incorporating a processing handle member

US7307003B2 · kind B2 · utility

292Cited by
46References
45Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 2003
Grant dateDec 11, 2007
Priority date
Expiry dateJan 14, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of forming a multi-layer semiconductor structure includes attaching a handle-member to a top surface of a first structure using a first interface. At least one region of a bottom surface of the first structure is etched to form at least a first via-hole for exposing a portion of a first conductive member defined on the first structure. A conductive material is disposed in the first via-hole such that a first end of the conductive material is in electrical communication with the first conductive member and a second end of the conductive material is exposed at the bottom surface of the first structure. A second interface is disposed over at least the second end of the conductive material, which serves as a bonding and/or electrical interface between the first conductive member defined on the first structure and a second structure of the multi-layer semiconductor device structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.